TOC Macro does not work with certain characters in headline (FF, IE9, IE10)

After updating to confluence 5.1.4 (yesterday) i found the TOC-macro is not working as expected: it creates the table of contents defined by the level of the headlines fine. But clicking on the links it creates does not jump to the chapter in the page, when certain characters are in the headline. So far I found out that these characters don't work:
German characters: ä,ö,ü,ß
But also quite normal ones: "", :, , (comma)

Strange, that did work with confluence 4.2. We use the german localized version of confluence on the same linux server (cent-os) as before with version 4.2